부산대학교 도서관

The ultrafast laser writing of optical waveguides and devices is increasingly ubiquitous among the photonics community, mostly for its flexibility and three-dimensional fabrication capability. The well-known astigmatic beam technique is the simplest method to inscribe near-circular cross-section waveguides. In this paper, we report on a significant enhancement to the widely used astigmatic beam technique that makes it more flexible and yields a more circular waveguide cross section. By simply superposing a long-focus lens before the laser inscription objective lens, we demonstrate that the normalized squared radial deviation from a perfectly circular waveguide cross section can be reduced to <4×10^−4, which is a significant improvement compared to >0.1 typically obtained using the standard astigmatic beam technique, or >0.7 with a Gaussian beam. The modified technique also makes it easy to use the full power delivered by the laser, which is not usually the case with the standard technique. A technique to optimize the waveguide shape prior to the inscription by in situ laser-induced plasma emission imaging is also discussed.