학술논문

Composition and Structure of Films Deposited from Silyl Derivatives of Asymmetrical Dimethylhydrazine.
Document Type
Article
Source
Inorganic Materials; Feb2003, Vol. 39 Issue 2, p117-122, 6p
Subject
THIN films
CHEMICAL vapor deposition
SILYLATION
INDUSTRIAL chemistry
INORGANIC chemistry
Language
ISSN
00201685
Abstract
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