학술논문
Fluorine atom abstraction by Si(100). I. Experimental.
Document Type
Article
Author
Source
Journal of Chemical Physics; 8/22/1999, Vol. 111 Issue 8, p3679, 17p
Subject
Language
ISSN
00219606
Abstract
Studies the interaction of low energy fluorine with silicon(100), a dissociative chemisorption mechanism called atom abstraction. Characterization of the dynamics of atom abstraction through time-of-flight measurements of the scattered fluorine atoms; Absolute probability of the three scattering channels.