학술논문
Magnetic Field Resonance and Pressure Effects on Epitaxial Thin Film Deposition and In Situ Plasma Diagnostics.
Document Type
Article
Author
Source
Plasma Chemistry & Plasma Processing; Jan2018, Vol. 38 Issue 1, p247-259, 13p
Subject
Language
ISSN
02724324
Abstract
Copyright of Plasma Chemistry & Plasma Processing is the property of Springer Nature and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)