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Impact of modelisation pixel size on OPC consistency.

Document Type

Article

Author

Foussadier, Franck; Yesilada, Emek; Le Denmat, Jean-Christophe; Trouiller, Yorick; Farys, Vincent; Robert, Frédéric; Kerrien, Gurwan; Gardin, Christian; Perraud, Loic; Vautrin, Florent; Villaret, Alexandre; Martinelli, Catherine; Planchot, Jonathan; Di-Maria, Jean Luc; Saied, Mazen; Top, Mame Kouna

Source

Proceedings of SPIE; Nov2009, Issue 1, p727416-727416-7, 7p

Subject

Language

ISSN

0277786X

Online Access

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