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Electron beam mask writer EBM-7000 for hp 32nm generation.

Document Type

Article

Author

Kamikubo, Takashi; Ohtoshi, Kenji; Nakayamada, Noriaki; Nishimura, Rieko; Sunaoshi, Hitoshi; Akeno, Kiminobu; Mitsui, Soichiro; Tachikawa, Yuichi; Inoue, Hideo; Oogi, Susumu; Higurashi, Hitoshi; Mine, Akinori; Ishimura, Takiji; Tsuchiya, Seiichi; Gomi, Yoshitada; Matsui, Hideki; Tamamushi, Shuichi

Source

Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74881E-74881E-10, 10p

Subject

Language

ISSN

0277786X

Online Access

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