학술논문

High-performance a-ITZO TFTs with high bias stability enabled by self-aligned passivation using a-GaOx.
Document Type
Article
Source
Applied Physics Letters; 11/21/2022, Vol. 121 Issue 21, p1-6, 6p
Subject
PASSIVATION
THIN film transistors
AMORPHOUS semiconductors
IONIZATION energy
DC sputtering
THRESHOLD voltage
ELECTRON affinity
Language
ISSN
00036951
Abstract
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