학술논문
Sb-surfactant-mediated growth of Si/Si[sub 1-y]C[sub y] superlattices by molecular-beam epitaxy.
Document Type
Article
Author
Source
Applied Physics Letters; 10/23/1995, Vol. 67 Issue 17, p2530, 3p, 2 Black and White Photographs, 1 Graph
Subject
Language
ISSN
00036951
Abstract
Examines the antimony-surfactant-mediated growth of silicon (Si)/Si[sub 0.97]C[sub 0.03] superlattices. Use of reflection high energy electron diffraction and transmission electron microscopy; Composition and layer thickness of lattices; Role of carbon for the two-dimensional growth of homoepitaxial Si.