학술논문

Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles.
Document Type
Article
Source
Coatings (2079-6412); Jun2023, Vol. 13 Issue 6, p991, 15p
Subject
MAGNETRON sputtering
THIN films
MAGNETRONS
PHYSICAL vapor deposition
PLASMA gases
Language
ISSN
20796412
Abstract
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