학술논문
Estimation of emission efficiency for laser-produced EUV plasmas.
Document Type
Article
Author
Kawamura, Toru; Sunahara, Atsushi; Gamada, Kouhei; Fujima, Kazumi; Koike, Fumihiro; Furukawa, Hiroyuki; Nishikawa, Takeshi; Sasaki, Akira; Kagawa, Takashi; More, Richard; Kato, Takako; Murakami, Masakatsu; Zhakhovskii, Vasillii; Tanuma, Hajime; Fujimoto, Takashi; Shimada, Yoshinori; Yamaura, Michiteru; Hashimoto, Kazuhisa; Uchida, Shigeaki; Yamanaka, Chiyoe
Source
Proceedings of SPIE; Nov2004, Issue 1, p918-925, 8p
Subject
Language
ISSN
0277786X