학술논문

A Novel Top-Down Fabrication Process for Vertically-Stacked Silicon-Nanowire Array.
Document Type
Article
Source
Applied Sciences (2076-3417); Feb2020, Vol. 10 Issue 3, p1146, 10p
Subject
SILICON nanowires
BIOSENSORS
OPTICAL properties
PHOTOLITHOGRAPHY
Language
ISSN
20763417
Abstract
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