학술논문

An Analytical Metal Resistance Model and Its Application for Sub-22-nm Metal-Gate CMOS.
Document Type
Article
Source
IEEE Electron Device Letters; Apr2015, Vol. 36 Issue 4, p384-386, 3p
Subject
COMPLEMENTARY metal oxide semiconductors
MEAN free path (Physics)
ELECTRONS
ROUGH surfaces
SEMICONDUCTORS
Language
ISSN
07413106
Abstract
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