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Characterization of FIB Damage in Silicon.

Document Type

Article

Author

Bailey, GW; Jerome, WG; McKernan, S; Mansfield, JF; Price, RL; Urbanik, CA; Prenitzer, BI; Gianhuzzi, LA; Brown, SR; Shofner, TL; Rossie, B; Irwin, RB; Stevie, FA

Source

Microscopy & Microanalysis; 1999 Supplement, p740-741, 2p

Subject

Language

ISSN

14319276

Online Access

Full Text (Oxford University Press) Open Access (EBSCO) Web of Science JCR 저널정보 Scopus Find it@PNU

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