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Development of New Metamaterials for Advanced Element Base of Micro- and Nanoelectronics, and Microsystem Devices.

Document Type

Article

Author

Ageev, O. A.; Balakirev, S. V.; Bykov, A. V.; Gusev, E. Yu.; Fedotov, A. A.; Jityaeva, J. Y.; Il'in, O. I.; Il'ina, M. V.; Kolomiytsev, A. S.; Konoplev, B. G.; Krasnoborodko, S. U.; Polyakov, V. V.; Smirnov, V. A.; Solodovnik, M. S.; Zamburg, E. G.

Source

Advanced Materials: Manufacturing, Physics, Mechanics & Applications; 2016, p563-580, 18p

Subject

Language

Online Access

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