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An experimental study of anharmonic micromachined silicon resonators.

Document Type

Article

Author

Ayela, F; Fournier, T

Source

Measurement Science & Technology; 1998, Vol. 9 Issue 11, p1821-1830, 10p

Subject

Language

ISSN

09570233

Online Access

Web of Science JCR 저널정보 Scopus Find it@PNU

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