학술논문
Direct MBE growth of metamorphic nBn infrared photodetectors on 150 mm Ge-Si substrates for heterogeneous integration.
Document Type
Article
Author
Fastenau, Joel M.; Lubyshev, Dmitri; Nelson, Scott A.; Fetters, Matthew; Krysiak, Hubert; Zeng, Joe; Kattner, Michael; Frey, P.; Liu, Amy W. K.; Morgan, Aled O.; Edwards, Stuart A.; Dennis, Richard; Beech, Kim; Burrows, Doug; Patnaude, Kelly; Faska, Ross; Bundas, Jason; Reisinger, Alex; Sundaram, Mani
Source
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2019, Vol. 37 Issue 3, pN.PAG-N.PAG, 6p
Subject
Language
ISSN
21662746
Abstract
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