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CNT pellicles: imaging results of the first full-field EUV exposures.

Document Type

Proceedings

Author

Felix, Nelson M.; Lio, Anna; Bekaert, Joost; Gallagher, Emily; Jonckheere, Rik; Van Look, Lieve; Aubert, Remko; Nair, Vineet V.; Timmermans, Marina Y.; Pollentier, Ivan; Hendrickx, Eric; Klein, Alexander; Yeğen, Gokay; Broman, Pär

Source

Proceedings of SPIE; 11/2/2020, Vol. 11609, p116090Z-116090Z-9, 1p

Subject

Language

ISSN

0277786X

Online Access

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