학술논문
Photonic crystal cavities in cubic (3C) polytype silicon carbide films.
Document Type
Academic Journal
Author
Source
Publisher: Optica Publishing Group Country of Publication: United States NLM ID: 101137103 Publication Model: Print Cited Medium: Internet ISSN: 1094-4087 (Electronic) Linking ISSN: 10944087 NLM ISO Abbreviation: Opt Express Subsets: PubMed not MEDLINE
Subject
Language
English
Abstract
We present the design, fabrication, and characterization of high quality factor (Q ~10(3)) and small mode volume (V ~0.75 (λ/n)(3)) planar photonic crystal cavities from cubic (3C) thin films (thickness ~200 nm) of silicon carbide (SiC) grown epitaxially on a silicon substrate. We demonstrate cavity resonances across the telecommunications band, with wavelengths from 1.25 - 1.6 μm. Finally, we discuss possible applications in nonlinear optics, optical interconnects, and quantum information science.