학술논문
Lateral structuring of silicon thin films by interference crystallization.
Document Type
Article
Author
Source
Subject
*THIN films
*SILICON
*HOLOGRAPHY
*
*
Language
ISSN
0003-6951
Abstract
Examines the lateral structuring of silicon thin films by transient holography using high-energy pulse laser. Induction of crystallization by the energy density along the lines of the transient optical grid; Production of laterally structured microcrystalline silicon; Application of selective etching.