학술논문
X-ray-induced Cu deposition and patterning on insulators at room temperature.
Document Type
Article
Source
Subject
*IRRADIATION
*COPPER research
*PHOTORESISTS
*
*
Language
ISSN
0909-0495
Abstract
X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers. [ABSTRACT FROM AUTHOR]