학술논문
Electrical transport between delta layers in silicon.
Document Type
Article
Author
Source
Subject
*ELECTRIC properties of silicon
*SEMICONDUCTOR doping
*
Language
ISSN
0021-8979
Abstract
Presents a study which investigated the electrical transport between locally-grown delta-doped layers in silicon. Growth and characterization of local delta layers; Electrical transport measurements in the double-delta devices; Mechanisms for the vertical electrical transport between two delta layers.