학술논문
Moulded photoplastic probes for near-field optical applications.
Document Type
Article
Source
Subject
*OPTICS
*MICROFABRICATION
*SCIENCE
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Language
ISSN
0022-2720
Abstract
Examines moulded photoplastic probes for near-field optical applications. Development of a latest waferscale semibatch microfabrication process for transparent photoplastic probes; Advantage of the method; Use of focused ion beam milling.