학술논문
Growth stage of crystalline Y...O... film on Si(100) grown by an ionized cluster beam deposition.
Document Type
Article
Author
Source
Subject
*YTTRIUM alloys
*EPITAXY
*CRYSTALS
*
*
Language
ISSN
0021-8979
Abstract
Presents information on a study which investigated the initial and epitaxial growth stage of Yttrium...O.../silicon(100) grown by reactive ionized cluster beam deposition. Experimental details; Results and discussion; Conclusions.