학술논문
Comparative study of image contrast in scanning electron microscope and helium ion microscope.
Document Type
Article
Author
Source
Subject
*SCANNING electron microscopes
*SCANNING electron microscopy
*HELIUM ions
*CHARGING effects
*MICROSCOPES
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Language
ISSN
0022-2720
Abstract
Lay description The helium ion microscope (HIM) is a recent development in the family of charged-particle microscopes and it operates on similar working principles to those of the conventional scanning electron microscope (SEM). We investigated the effects of imaging parameters on HIM and SEM images using a Ga+ focused ion beam implanted silicon sample. Our results highlight the similarity and difference between the two microscopes and also show that imaging parameters as well as specimen properties have a significant impact on the quantification of HIM and SEM metrology. [ABSTRACT FROM AUTHOR]