부산대학교 도서관

Recent developments of novel plasma-optical systems are described. For the first time, a combined system including a MEVVA plasma source with a cylindrical electrostatic plasma-optical lens is considered. This combined system is of fundamental interest and could be attractive for a number of practical applications. The system can be used for effective repetitively pulsed, high current, moderate energy plasma sources of heavy metal ions and electrons. The hardware is interesting for high productivity technological equipment using relatively pure plasma flow for the synthesis of fine coatings and thin films. We have studied the plasma-dynamic characteristics of high density plasma flow propagating through the plasma lens, the optical spectra and the charge state distribution, as a function of different experimental conditions. Application of the plasma lens to the transport of low energy high-current ion beams can improve the delivery of plasma to a substrate, as well as providing micro-droplet evaporation and elimination due to the presence of fast electrons within the lens region. Here mainly the transport aspects, as well as the effect of fast electrons on the characteristics of low energy ion plasma beams are considered. [ABSTRACT FROM AUTHOR]