부산대학교 도서관

The paper features advancements of an architectural glass horizontal coater concept, which joins high product flexibility with high productivity, precise process management, and ease of operation and maintenance. This highly modular glass coater is characterized by variable positions of gas separation stages; good process-to-process gas separation; further, each compartment can accommodate just as needed for the actually demanded process, any one rsp. Two from the entire palette of process tools, like TwinMag II, single/double planar cathode, single/double rotatable cathode or plasma treatment sources. Particular subject matter are the improvements of the process control system achieved by the integration of a reactive sputter process closed loop control, and by the use of a new partial pressure sensor, there is no need for an additional turbo pump. Use of ceramic targets in place of metallic ones, as well as various mainly MF- power applications are described. Coatings will be discussed showing an uniformity of ≤±1.2% thickness variation over a glass width of 3.2 m and a good optical quality. Long-term process stability will be shown for a typical product. [Copyright &y& Elsevier]