학술논문
Investigation of the Modified Structure of a Quantum Cascade Laser.
Document Type
Article
Author
Source
Subject
*QUANTUM cascade lasers
*MOLECULAR beam epitaxy
*MOLECULAR beams
*PLASMA etching
*PHOTOLITHOGRAPHY
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Language
ISSN
1063-7826
Abstract
The process of obtaining a modified structure for quantum cascade lasers is studied; this process includes growth using molecular-beam epitaxy, plasma etching, photolithography with the use of liquid etching, and the formation of special contacts for decreasing losses in the waveguide. The use of a special type of structure makes it possible, even without postgrowth overgrowth with a high-resistivity material, to attain parameters satisfying requirements to heterostructures in high-quality quantum cascade lasers at maximal simplification of the entire preparation process. [ABSTRACT FROM AUTHOR]