학술논문
Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering.
Document Type
Article
Author
Source
Subject
*TITANATES
*FERROELECTRIC thin films
*SPUTTERING (Physics)
*REFLECTANCE spectroscopy
*POLYCRYSTALS
*OPTOELECTRONIC device evaluation
*X-ray diffraction
*LANTHANUM compounds
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Language
ISSN
0021-8979
Abstract
(Pb,La)(Zr,Ti)O3 (PLZT) thin films were grown on Pt/Ti/SiO2/Si and fused quartz substrates by radio-frequency magnetron sputtering at 650 °C. X-ray diffraction analysis shows that the PLZT films are polycrystalline with (100)-preferential orientation. The Al/PLZT/Pt capacitors have been fabricated and show good ferroelectric properties with the remanent polarization of 24.3 μC/cm2 and coercive field of 142 kV/cm. The leakage current density is only about 0.86×10-7 A/cm2 at 200 kV/cm. The energy gap Eg of the films is estimated to be about 3.54 eV by optical transmittance measurements. Their fundamental optical constants are obtained by a Filmetrics F20 reflectance spectrometer (F20). These results show that the PLZT ferroelectric thin films are promising materials for optoelectronic devices. [ABSTRACT FROM AUTHOR]