학술논문
Linewidth dependence of notchlike void generation in fine aluminum conductors.
Document Type
Article
Author
Source
Subject
*ALUMINUM
*ELECTRICAL conductors
*
Language
ISSN
0003-6951
Abstract
Investigates the linewidth dependence of notchlike void generation in fine aluminum conductors. Steps required for void generation; List of sequential diffusion processes for the generation of voids; Factors attributing to the decrease in void generation.