학술논문
AN INNOVATIVE MULTI-PROBE TOMOGRAPHIC ATOMIC FORCE MICROSCOPE FOR MATERIALS RESEARCH AND FAILURE ANALYSIS.
Document Type
Article
Author
Source
Subject
*ATOMIC force microscopes
*FAILURE analysis
*FRACTURE mechanics
*CONDENSED matter physics
*SCANNING probe microscopy
*SEMICONDUCTOR manufacturing
*
*
*
*
*
Language
ISSN
1537-0755
Abstract
The article focuses on the development of a novel multi-probe tomographic atomic force microscope (AFM) for materials research and failure analysis in the semiconductor industry. It discusses the advantages of this new AFM system; including its ability to alternate between multiple probe tips for material removal and sensing; automated control of removal rates; the suppression of tip-induced artifacts; and mapping of various materials and structures.