학술논문
SUPERCONDUCTING X-RAY SENSORS FOR TOMOGRAPHY OF MICROELECTRONICS.
Document Type
Article
Source
Subject
*MICROELECTRONICS
*X-rays
*SCIENTIFIC apparatus & instruments
*SUPERCONDUCTING quantum interference devices
*X-ray spectrometers
*FUEL cycle
*
*
*
*
*
Language
ISSN
1537-0755
Abstract
The article focuses on the application of superconducting x-ray detectors in tomographic analysis of microelectronics. It discusses the challenges in analyzing the internal structure and composition of integrated circuits (ICs); the use of superconducting transition-edge sensors (TES) to enhance the efficiency and accuracy of x-ray imaging; enabling non-destructive tomography of ICs; and also explores future directions.