학술논문
Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma.
Document Type
Article
Author
Source
Subject
*PHOTOLITHOGRAPHY
*PHOTOLITHOGRAPHY equipment
*PLASMA engineering
*TIN
*RADIATION
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*
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*
Language
ISSN
0003-6951
Abstract
Experimental studies of stopping of ion fluxes from laser-produced plasma by a low-pressure gas atmosphere are presented. A modification of the time-of-flight spectroscopy technique is proposed for the stopping cross-sectional measurements in the ion energy range of 0.1–10 keV. The application of the proposed technique is demonstrated for Sn ion stopping by H2 gas. This combination of elements is of particular importance for the development of plasma-based sources of extreme ultraviolet radiation for lithographic applications. [ABSTRACT FROM AUTHOR]