부산대학교 도서관

The flow of a hydrogen-methane mixture through heated coaxial cylindrical tungsten channels with a built-in tungsten wire is studied by the Direct Simulation Monte Carlo method. The purpose of the study is further development of the gas-phase method of deposition of diamond structures. The axial distributions of the concentrations of the components of the hydrogen-carbon mixture are calculated by means of solving a system of chemical kinetics equations. A series of experiments on deposition of diamond structures from various flows of the hydrogen-methane mixture is performed. The calculated results are compared with the experimental data. Based on these comparisons, it is concluded that numerical optimization of operation modes of gas-dynamic reactors can be used for deposition of diamond structures. [ABSTRACT FROM AUTHOR]