부산대학교 도서관

Abstract: This paper focuses on the electrical properties of Bi0.95Nd0.05FeO3 thin films (BNFO05) deposited on Pt/TiO2/SiO2/Si (100) substrates by the soft chemical method. A BNFO05 single phase was simultaneously grown at a temperature of 500°C for 2h. Room temperature magnetic coercive field indicates that the film is magnetically soft. The remanent polarization (P r ) and the coercive field (E c ) measured were 51μC/cm2 and 65.0kV/cm, respectively, and were superior to the values found in the literature. XPS results show that the oxidation state of Fe is purely 3+, which is beneficial for producing a BNFO05 film with low leakage current. The polarization of the Au/BNFO05 on Pt/TiO2/SiO2/Si (100) capacitors with a thickness of 230nm exhibited no degradation after 1×108 switching cycles at a frequency of 1MHz. Experimental results demonstrated that the soft chemical method is a promising technique for growing films with excellent electrical properties, and can be used in various integrated device applications. [Copyright &y& Elsevier]