학술논문
Investigation of Ti/Au Transition-Edge Sensors for Single-Photon Detection.
Document Type
Article
Author
Source
Subject
*SUPERCONDUCTING transition temperature
*PHOTON counting
*DETECTORS
*
*
Language
ISSN
0022-2291
Abstract
Transition-edge sensors (TES) are remarkable superconducting devices for a wide range of radiation detection with the ability of both energy resolution and counting photons. For the detection of single photons at telecom wavelength, optical Ti/Au bilayer TESs are fabricated and characterized. The superconducting transition temperature (Tc) of the Ti/Au films is effectively tuned from 162 to 72 mK by increasing the relative thickness ratio between the Au and Ti layer. The sensitive area is 20 μm × 20 μm, on which an SiO2/SiNx antireflection structure is coated by an ICP-PECVD process. The TES device shows an energy resolution of 0.19 eV and can discriminate up to 36 incident photons, with an effective time constant around 107 µs at 95 mK. [ABSTRACT FROM AUTHOR]