학술논문
Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam.
Document Type
Article
Author
Source
Subject
*ULTRAVIOLET spectroscopy
*RAMAN spectroscopy
*SCATTERING (Physics)
*THIN films
*NITRIDES
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Language
ISSN
0947-8396
Abstract
Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp[sup 3] C atoms in carbon nitride films. Both C-N bonds and C≡N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp[sup 3] C fraction, and an increase of the sp[sup 2] C fraction, the sp[sup 2] C cluster size, the C-N bond fraction and the C≡N bond fraction in carbon nitride films. [ABSTRACT FROM AUTHOR]