학술논문
Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma.
Document Type
Article
Author
Source
Subject
*ELECTRON temperature
*ELECTRON temperature measurement
*OPTICAL measurements
*RESONATORS
*ARGON plasmas
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Language
ISSN
0963-0252
Abstract
Electron temperature is measured from time resolved hairpin resonator probe measurements in a pulsed capacitively coupled argon plasma at 400 mTorr. Effective collision frequency is related to the electron energy distribution via the effective conductivity and closes a system of equations that allow electron temperature to be determined. Results generally show good agreement with expected behavior and unfiltered time-resolved optical emission measurements. [ABSTRACT FROM AUTHOR]