부산대학교 도서관

Oxidation is critical to metal chemical mechanical polishing (CMP). In this work, the role of oxidation in the material removal of GCr15 bearing steel during CMP was thoroughly investigated. Six representative oxidizers were selected to acquire the material removal rate (MRR) data. There are three distinct MRR trends. The oxidizers can be divided into three categories based on the MRR and surface composition results. For the first, with the concentration of H 2 O 2 or KIO 3 increasing, the MRR first sharply increases, then decreases and stabilizes; For the second, as the concentration of KClO 3 or NaClO increases, the MRR first increases and then levels off; For the third, with the concentration of K 2 S 2 O 8 or Fe(NO 3) 3 increasing, the MRR almost linearly increases. According to the reaction kinetics and steady state, a fundamental MRR model considering iron oxidation and removal processes was built, and then applied to the three categories of oxidizers combined with the specific oxidation paths. The fitting results agree with the MRR data. Moreover, the key to realizing efficient removal of GCr15 steel is Fe2+ for H 2 O 2 , KIO 3 , KClO 3 and NaClO, while Fe 3 O 4 for K 2 S 2 O 8 and Fe(NO 3) 3. The findings can deepen the understanding of oxidation in metal CMP. • The six representative oxidizers for GCr15 steel CMP can be divided into three categories. • A fundamental MRR model considering iron oxidation and removal was built. • The key to efficient removal of GCr15 steel is Fe2+ for H 2 O 2 , KIO 3 , KClO 3 and NaClO, while Fe 3 O 4 for K 2 S 2 O 8 and Fe(NO 3) 3. [ABSTRACT FROM AUTHOR]