학술논문

Nucleation, growth, percolation, and amorphous to crystalline transition of ultrathin molybdenum films.
Document Type
Article
Source
Journal of Applied Physics. 12/1/2006, Vol. 100 Issue 11, p113709. 7p. 1 Chart, 7 Graphs.
Subject
*MOLYBDENUM
*THIN films
*NUCLEATION
*PERCOLATION theory
*SUBSTRATES (Materials science)
*ANISOTROPY
Language
ISSN
0021-8979
Abstract
We report on the nucleation, growth, percolation, and crystalline transition of ultrathin layers of molybdenum deposited on float glass substrate by in situ electrical properties. The transition from insulating to metallic state (I-M) is shown as a function of molybdenum film thickness and sheet resistance. In the island growth regime, the electrical conductance (G) has two exponential dependencies on thickness (t), namely, log G-B1∝t and log G-B2∝t, explained as the anisotropic and isotropic growth of islands, respectively. In the I-M transition region, the electrical conductance of the films follows the scaling law G∝(t-tc)q. The value of critical exponent q determined from the present experiments agrees well with the theoretically predicted values for the critical exponent of conductivity in a two-dimensional percolating system. The amorphous to crystalline transition is also observed. The microscopic picture of film growth, derived from in situ sheet resistance measurements shows good agreement with that predicted by the percolation theory. [ABSTRACT FROM AUTHOR]