학술논문
Swift Xe ion irradiation effect on structure and vibrational properties of undoped and Cd-doped ZnO films.
Document Type
Article
Author
Source
Subject
*ZINC oxide films
*RADIOFREQUENCY sputtering
*MAGNETRON sputtering
*IRRADIATION
*X-ray scattering
*CRYSTAL lattices
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Language
ISSN
1862-6351
Abstract
The undoped and Cd-doped (0.4, 0.5 at.%) ZnO films deposited by radiofrequency magnetron sputtering have been irradiated by 167 MeV Xe26+ ions with energy to a fluence 3×1012 ions/cm2. The structure and vibrational properties of as-grown and irradiated samples were studied using X-ray diffraction and Raman spectroscopy techniques. It was found that Cd-doped ZnO films in comparison with undoped films demonstrate an improvement of crystal structure due to increased size of X-ray coherent scattering regions, relaxation of strain between grains in the films and reduction of modes which relates to defects in ZnO crystal lattice. (© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) [ABSTRACT FROM AUTHOR]