학술논문
Sodium passivation dependence on phosphorus concentration in tetraethylorthosilicate plasma-enhanced chemical vapor deposited phosphosilicate glasses.
Document Type
Article
Source
Subject
*CHEMICAL vapor deposition
*DIFFUSION
*
Language
ISSN
0021-8979
Abstract
Presents a study which examined the effectiveness of tetraethylorthosilicate plasma-enhanced chemical vapor deposited phosphosilicate glasses, as the barrier to sodium diffusion, as a function of the phosphorous concentration. Information on the silicon integrated circuit technology; Materials and methods used; Results.