학술논문
Enrichment of daughter nuclides of natural alpha-decay series in high purity aluminum for LSI fabrication.
Document Type
Article
Author
Source
Subject
*RADIOISOTOPES
*ALPHA decay
*RADIOACTIVE decay
*URANIUM isotopes
*THORIUM isotopes
*NUCLEAR chemistry
*RADIOCHEMISTRY
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Language
ISSN
0236-5731
Abstract
Uranium and thorium isotopes were determined in highly pure aluminum for LSI fabrication by alpha-spectrometry utilizing natural 147Sm as an inner standard. Daughter nuclides in natural decay series are found in an enrichment state from radioactive equilibrium. Unexpected contamination that had a ground water origin was supposed to explain the enrichment. This finding suggests strongly that alpha-spectrometry is still quite an important technique to evaluate soft-error probability for modern memory device materials since highly sensitive instrumental analysis such as ICP-MS is not sensitive enough to short-lived alpha-emitters. [ABSTRACT FROM AUTHOR]