학술논문
Physicochemical principles underlying the preparation of high-purity substances for microelectronic and optical applications.
Document Type
Article
Source
Subject
*MICROELECTRONICS
*VAPOR-liquid equilibrium
*VAPOR-solid interfaces
*LIQUID-liquid equilibrium
*ORGANOMETALLIC compounds
*SOLVENTS
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Language
ISSN
0020-1685
Abstract
This paper presents results on liquid-vapor, solid-vapor, liquid-liquid, and crystal-melt equilibria in solvent-solute systems. The data provide a physicochemical basis for the development of processes for the ultrapurification of volatile compounds of group II to VI elements (halides, hydrides, metalorganic compounds, and elemental substances). [ABSTRACT FROM AUTHOR]