학술논문
Influence of the Discharge Burning Conditions on Distributions of the Parameters of Plasma Generated in a Non-Self-Sustaining Glow Discharge Inside a Hollow Cathode.
Document Type
Article
Source
Subject
*GLOW discharges
*CATHODES
*NITROGEN plasmas
*PLASMA sources
*PLASMA production
*LANGMUIR probes
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Language
ISSN
1064-8887
Abstract
The parameters of the plasma of a non-self-sustaining glow discharge generated inside a metal hollow cathode 300 mm long and 25 mm in inner diameter are investigated. A feature of this system is the additional injection of electrons from the auxiliary discharge plasma formed by the plasma source with a combined PINK heated and hollow cathode. The dependences and combustion modes of the non-self-sustaining glow discharge are presented and described at a pressure in the range (0.06–1.4) Pa and a combustion voltage of (70–300) V. Studies of the plasma parameters using double Langmuir probes have shown that this discharge system provides generation of the nitrogen plasma inside the hollow cathode with inhomogeneity from ±12 to ±63%. [ABSTRACT FROM AUTHOR]