학술논문

Fabrication, microstructure, and mechanical properties of high strength cobalt sub-micron structures
Document Type
Article
Source
Materials Science & Engineering: A. Aug2012, Vol. 552, p104-111. 8p.
Subject
*MICROFABRICATION
*MICROSTRUCTURE
*MECHANICAL properties of metals
*STRENGTH of materials
*TRANSMISSION electron microscopy
*ELECTROPLATING
*ELECTRON beam lithography
Language
ISSN
0921-5093
Abstract
Abstract: The mechanical properties exhibited by sub-micron scale columnar structures of cobalt, fabricated by electron beam lithography and electroplating techniques, were investigated through uniaxial compression. Transmission electron microscopy analyses show these specimens possess a microstructure with sub-micron grains which are elongated and aligned near to the pillar loading axis. In addition, small nanocrystalline cobalt crystals are also present within the columnar structure. These specimens display exceptional mechanical strength comparable with both bulk polycrystalline and nanocrystalline cobalt deposited by electroplating. Size-dependent softening with shrinking sample dimensions is also observed in this work. Additionally, the strength of these sub-micron structures appears to be strain rate sensitive and comparable with bulk nanocrystalline cobalt specimens. [Copyright &y& Elsevier]