학술논문
A phase map for sputter deposited niobium oxides.
Document Type
Article
Author
Source
Subject
*THIN films
*SPUTTERING (Physics)
*NIOBIUM
*OXYGEN
*
*
*
Language
ISSN
0021-8979
Abstract
Presents a study which addressed process parameter-growth environment-film structure relationships for the sputter deposited Nb-O materials system. Background on sputter deposition; Experimental procedure; Results of the study.