학술논문
Structure and mechanical properties of Ti-Al-N, Ti-Al-Ta-N, Ti-Al-Si-N and Ti-Al-Ta-Si-N coatings.
Document Type
Article
Source
Subject
*YOUNG'S modulus
*SCANNING electron microscopy
*RESIDUAL stresses
*TANTALUM
*X-ray diffraction
*MAGNETRON sputtering
*
*
*
*
*
Language
ISSN
0094-243X
Abstract
The investigation of the Ti-Al-N, Ti-Al-Ta-N, Ti-Al-Si-N, and Ti-Al-Ta-Si-N coatings deposited through magnetron sputtering was conducted by utilizing X-ray diffraction, scanning electron microscopy, and nanoindentation techniques to examine their structural and mechanical properties. The coatings were characterized by their respective chemical compositions, namely Ti0.45Al0.55N, Ti0.41Al0.49Ta0.10N, Ti0.41Al0.49Si0.10N, and Ti0.36Al0.44Ta0.10Si0.10N. It was found via X-ray diffraction analysis that all coatings possessed the B1-type face-centered cubic crystal structure. It was observed that the addition of Ta and Si had a significant impact on the residual compressive stresses in the Ti-Al-N coatings, resulting in a value as high as -6.8 GPa in the Ti-Al-Ta-Si-N coating. The Ti-Al-Ta-Si-N coating exhibited the highest hardness among all coatings, but had a lower Young's modulus in comparison to the Ti-Al-Si-N composition. [ABSTRACT FROM AUTHOR]