부산대학교 도서관

This paper presents a novel compliant Delta micromanipulator with low parasitic motions. Flexure joints are used to construct the compliant counterpart of the Delta robot. The rigid-body modelling technique is employed for forward and inverse kinematic modelling. The compliance analysis of the design is formulated by resorting to the matrix method. Then, finite-element-analysis (FEA) simulations are done to verify the analytical models. The results confirm with acceptable deviations. Compensation factor based correction in the kinematic model is then proposed, which reduces the errors even further. A comparison with the other reported designs reveals that the proposed design displays an overall superior performance in terms of errors and parasitic motions. For an expected 50 μ m motion, the maximum error is observed to be 0.422%, and the maximum parasitic motions in the x, y, and z directions are 0.044%, 0.095%, and 0.018%, respectively. [ABSTRACT FROM AUTHOR]