학술논문
Hydrogenated Nanoporous Diamond Films.
Document Type
Article
Source
Subject
*DIAMONDS
*THIN films
*POROSITY
*HYDROGENATION
*ELECTRON paramagnetic resonance
*HYDROGEN
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Language
ISSN
0020-1685
Abstract
Nanoporous diamond films up to 20 µm thick with a pore size of 1–1.5 nm and porosities from 0.4 to 0.6 are produced by selective etching in air. The effect of hydrogen plasma processing on the IR absorption and electron paramagnetic resonance spectra of the films is investigated. The results indicate that the concentration of bonded hydrogen in the hydrogenated nanoporous diamond films attains 20 at %. The kinetics of hydrogen desorption are studied as a function of temperature. [ABSTRACT FROM AUTHOR]