학술논문

Applying monochromated silver X‐rays to the surface characterization of silicon‐containing materials.
Document Type
Article
Source
Surface & Interface Analysis: SIA. Jun2023, Vol. 55 Issue 6, p548-555. 8p.
Subject
*SURFACE analysis
*X-rays
*X-ray photoelectron spectroscopy
*BINDING energy
*SILVER
*RAMAN scattering
*GALACTIC X-ray sources
Language
ISSN
0142-2421
Abstract
Although the use of a monochromated silver X‐ray source for X‐ray photoelectron spectroscopy (XPS) analysis was first reported in the 1980s, it has found limited application. Two important advances have been made in recent years that now enable it to be used more routinely for surface analysis. These advancements are the development of relative sensitivity factors for quantification and the fully motorized dual silver/aluminum X‐ray source, which enables the change to monochromated X‐ray energies in a few minutes versus hours. Silicones are an important class of materials that have unique chemical properties that can vary from liquids to glass‐like materials. XPS, with monochromatic Al Kα X‐rays, is used routinely to characterize silicon‐containing materials and to identify different silicone functional groups. This was aided by the work published on the analysis of Si 2p peaks acquired from polysiloxane materials. The binding energy increases nonlinearly when methyl groups on a silicon atom are replaced by oxygen atoms. This work will now be extended to determine the binding energy shifts in Si 1s, 2s, and Auger spectra, which will allow the identification of silicon chemistry when using monochromated silver X‐rays. The Auger parameters of the different polysiloxanes will be compared to those of other silicon‐containing materials. Comparison of the depth of analysis in silicon‐containing materials when changing from aluminum to silver X‐rays will also be addressed. [ABSTRACT FROM AUTHOR]